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Microheaters for copper oxide-based gas sensors

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dc.contributor.author ABABII, Nicolai
dc.contributor.author TROFIM, Viorel
dc.contributor.author LUPAN, Oleg
dc.date.accessioned 2020-06-11T10:03:05Z
dc.date.available 2020-06-11T10:03:05Z
dc.date.issued 2020
dc.identifier.citation ABABII, Nicolai, TROFIM, Viorel, LUPAN, Oleg. Microheaters for copper oxide-based gas sensors. In: Journal of Engineering Science. 2020, Vol. 27(2), pp. 52-61. ISSN 2587-3474. eISSN 2587-3482. en_US
dc.identifier.issn 2587-3474
dc.identifier.issn 2587-3482
dc.identifier.uri https://doi.org/10.5281/zenodo.3784343
dc.identifier.uri http://repository.utm.md/handle/5014/8882
dc.description.abstract This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400°C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature. en_US
dc.description.abstract În lucrare sunt descrise doua proceduri de obţinere a microîncălzitoarelor pentru senzorii de gaz pe baza oxidului de cupru. Se cercetează diferite tipuri de substraturi (sticlă, SiO2/Si și ceramică), precum și diferite configuraţii ale parametrilor geometrici pentru elementele de încălzire de tip meandru. Se demonstrează că microîncălzitoarele fabricate pe substraturile din sticlă, ceramică și SiO2/Si pot rezista până la o temperatură de ~400°C, ceea ce permite integrarea acestora pentru aplicaţii în dispozitivele de detectare a gazelor cu scopul de a menţine temperatura de funcţionare necesară. ro
dc.language.iso en en_US
dc.publisher Tehnica UTM en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject microheaters en_US
dc.subject copper oxide en_US
dc.subject gas sensors en_US
dc.subject glass substrates en_US
dc.subject semiconductors en_US
dc.subject microîncălzitoare en_US
dc.subject oxid de cupru en_US
dc.subject senzori de gaze en_US
dc.subject substraturi de sticlă en_US
dc.subject semiconductori en_US
dc.title Microheaters for copper oxide-based gas sensors en_US
dc.type Article en_US


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