SCHRÖDER, Stefan; STRUNSKUS, Thomas; ABABII, Nicolai; LUPAN, Oleg; MAGARIU, Nicolae; FAUPEL, Franz
(Technical University of Moldova, 2021)
Initiated chemical vapor deposition (iCVD) is a solvent-free polymer thin film deposition process which can be used to produce high quality dielectric thin films with nanoscale control and circumvents thus these problems. ...