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Browsing Conferinţa "Microelectronics and Computer Science" by Subject "reactive sputtering"

Browsing Conferinţa "Microelectronics and Computer Science" by Subject "reactive sputtering"

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  • KOROTCOV, Alexandru; HUANG, Ying-Sheng; TSAI, Dah-Shyang (Technical University of Moldova, 2005)
    Well-aligned IrO2 nanocrystals (NCs) have been grown on sapphire (SA) substrates by rf magnetron sputtering using Ir metal target. The surface morphology and structural properties of the as-deposited NCs were characterized ...

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