Low power thermocatalytic sensors with nanostructured gas sensitive materials

Abstract

Micro-catalytic gas sensors are essential devices for detection of combustive gases up to lower explosion limit (LEL). As the power dissipation of Pt coil based sensors are 120 - 150 mW [1] intensive research is devoted to reduce it to the order range while preserving sensitivity and stability. The reported micro-hotplate structures can operate up to 600 oC at a cost of 20-50 mW power consumption [2]. Nowadays the research activity is focused on development and processing of stable, nano-structured catalyst layer in MEMS compatible thick film form.