The plasticity index of the /soft-film/soft-substrate/ coated systems

PYRTSAC, Constantin; GRABCO, Daria

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dc.contributor.author	PYRTSAC, Constantin
dc.contributor.author	GRABCO, Daria
dc.date.accessioned	2019-10-31T13:44:09Z
dc.date.available	2019-10-31T13:44:09Z
dc.date.issued	2019
dc.identifier.citation	PYRTSAC, Constantin, GRABCO, Daria. The plasticity index of the /soft-film/soft-substrate/ coated systems. In: Electronics, Communications and Computing: extended abstracts of the 10th Intern. Conf.: the 55th anniversary of Technical University of Moldova, Chişinău, October 23-26, 2019. Chişinău, 2019, p.71. ISBN 978-9975-108-84-3.	en_US
dc.identifier.isbn	978-9975-108-84-3
dc.identifier.uri	http://repository.utm.md/handle/5014/5791
dc.description	Abstract	en_US
dc.description.abstract	The advanced devices from the last years contain thin films deposited on substrates of materials with different properties, thus forming coated systems (CS) of film/substrate type. Scientists, as well as engineering staff are increasingly interested in knowing the mechanical properties of CS used in micro- and nanoelectromechanical systems [1]. In this paper, we investigate CS of the type „soft-film/soft-substrate” – Cu/LiF with different thickness of films: nanometric (t1=85 nm), submicronic (t2=470 nm) and micrometric (t3=1000 nm), obtained by the magnetron sputtering method.	en_US
dc.language.iso	en	en_US
dc.publisher	Tehnica UTM	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	coated systems	en_US
dc.subject	nanoindentation	en_US
dc.subject	mechanical properties	en_US
dc.title	The plasticity index of the /soft-film/soft-substrate/ coated systems	en_US
dc.type	Article	en_US