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Методы повышения точности решающих правил контроля при производстве кристаллов микросхем

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dc.contributor.author ДОЛГОВ, Алексей Юрьевич
dc.date.accessioned 2019-12-06T13:32:37Z
dc.date.available 2019-12-06T13:32:37Z
dc.date.issued 2012
dc.identifier.citation ДОЛГОВ, Алексей Юрьевич. Методы повышения точности решающих правил контроля при производстве кристаллов микросхем. In: Telecommunications, Electronics and Informatics - ICTEI 2012: proc. of the 5th intern. conf., Technical University of Moldova, May 11-13, 2012. Chișinău, 2012, Vol. 1, pp. 340-345. ISBN 978-9975-45-082-9. en_US
dc.identifier.isbn 978-9975-45-082-9
dc.identifier.uri http://repository.utm.md/handle/5014/7336
dc.description.abstract Three solving rules operation selective control on small size samples (n=5 and 10), suitable for technological process of manufacture of integrated circuits crystals, allowing to reduce a subjective component of predicted reject up to 2, 3 times in comparison with operating check methods. en_US
dc.language.iso ru en_US
dc.publisher Technical University of Moldova en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject кристаллы микросхем en_US
dc.subject электрические кристаллы en_US
dc.subject электрофизические кристаллы en_US
dc.title Методы повышения точности решающих правил контроля при производстве кристаллов микросхем en_US
dc.type Article en_US


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