Sensing Properties of Ultra-Thin TiO2 Nanostructured Films Based Sensors

POSTICA, V.; REIMER, T.; LAZARI, E.; ABABII, N.; SHISHIYANU, S.; RAILEAN, S.; KAIDAS, V.; KAPS, S.; LUPAN, O.; BENECKE, W.; ADELUNG, R.

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dc.contributor.author	POSTICA, V.
dc.contributor.author	REIMER, T.
dc.contributor.author	LAZARI, E.
dc.contributor.author	ABABII, N.
dc.contributor.author	SHISHIYANU, S.
dc.contributor.author	RAILEAN, S.
dc.contributor.author	KAIDAS, V.
dc.contributor.author	KAPS, S.
dc.contributor.author	LUPAN, O.
dc.contributor.author	BENECKE, W.
dc.contributor.author	ADELUNG, R.
dc.date.accessioned	2020-05-12T14:34:33Z
dc.date.available	2020-05-12T14:34:33Z
dc.date.issued	2015
dc.identifier.citation	POSTICA, V., REIMER, T., LAZARI, E. et al. Sensing Properties of Ultra-Thin TiO2 Nanostructured Films Based Sensors. In: ICNMBE: International conference on Nanotechnologies and Biomedical Engineering: proc. of the 3rd intern. conf., Sept. 23-26 : Program & Abstract Book , 2015. Chişinău, 2015, p. 51.	en_US
dc.identifier.uri	https://doi.org/10.1007/978-981-287-736-9_36
dc.identifier.uri	http://repository.utm.md/handle/5014/8154
dc.description	Access full text - https://doi.org/10.1007/978-981-287-736-9_36	en_US
dc.description.abstract	In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and hydrogen gas sensing properties is investigated. An increase in current value of more than one order of magnitude (IUVON/IUVOFF~38) has been detected under exposure to UV light (365 nm) of sample with 45 nm thickness and annealed in furnace at 650 0C for 2 hours. Samples with 15 nm thickness and rapid thermal annealed at 450 0C for 3 min, have shown hydrogen gas response (~3.75).	en_US
dc.language.iso	en	en_US
dc.publisher	Tehnica UTM	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	ultra-thin films	en_US
dc.subject	films	en_US
dc.subject	gas sensors	en_US
dc.subject	photodetectors	en_US
dc.title	Sensing Properties of Ultra-Thin TiO2 Nanostructured Films Based Sensors	en_US
dc.type	Article	en_US