Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films

HAREA, E. E.; AIFANTIS, K. E.; PYRTSAC, K. M.; GHIMPU, L.

dc.contributor.author	HAREA, E. E.
dc.contributor.author	AIFANTIS, K. E.
dc.contributor.author	PYRTSAC, K. M.
dc.contributor.author	GHIMPU, L.
dc.date.accessioned	2021-11-03T10:12:25Z
dc.date.available	2021-11-03T10:12:25Z
dc.date.issued	2015
dc.identifier.citation	HAREA, E. E., AIFANTIS, K. E., PYRTSAC, K. M. Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films. In: Nanoscience Advances in CBRN Agents Detection, Information and Energy Security. NATO Science for Peace and Security Series A: Chemistry and Biology. 2015, pp. 53-59. ISBN 978-94-017-9697-2.	en_US
dc.identifier.isbn	978-94-017-9697-2
dc.identifier.uri	https://doi.org/10.1007/978-94-017-9697-2_5
dc.identifier.uri	http://repository.utm.md/handle/5014/17870
dc.description	Access full text: https://doi.org/10.1007/978-94-017-9697-2_5	en_US
dc.description.abstract	The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to −3.7.	en_US
dc.language.iso	en	en_US
dc.publisher	Springer Nature Switzerland	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	indium tin oxide	en_US
dc.subject	thin films	en_US
dc.subject	nanoindentations	en_US
dc.subject	sensors	en_US
dc.title	Cyclic Nanoindentation for Examination of the Piezoresistivity and the Strain-Sensor Behavior of Indium-Tin-Oxide Thin Films	en_US
dc.type	Article	en_US