DULGHERU, Valeriu
(Institutul de Inginerie Electronică şi Nanotehnologii "D. Ghiţu" al AŞM, 2003)
The X-ray deep litography, a polymer layer sensitive to X-rays is exposed to Xradiation from a synchrotron or electron storage ring by shading, which transfers an exact image of the abso structures on the mask into the ...