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Effect of Al Sn — Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering

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dc.contributor.author GHIMPU, Lidia
dc.contributor.author TIGINYANU, Ion
dc.contributor.author LUPAN, Oleg
dc.contributor.author MISHRA, Yogendra Kumar
dc.contributor.author PAULOWICZ, Ingo
dc.contributor.author GEDAMU, Dawit
dc.contributor.author COJOCARU, Ala
dc.contributor.author ADELUNG, Rainer
dc.date.accessioned 2020-08-19T09:47:04Z
dc.date.available 2020-08-19T09:47:04Z
dc.date.issued 2013
dc.identifier.citation GHIMPU, Lidia, TIGINYANU, Ion, LUPAN, Oleg et al. Effect of Al Sn — Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering. In: CAS. International Semiconductor Conference : proc. of the intern. conf.: Oct. 14-16, 2013, Sinaia, 2013, pp. 133-136. ISBN 978-1-4673-5672-5. ISBN 978-1-4673-5670-1. en_US
dc.identifier.isbn 978-1-4673-5670-1
dc.identifier.uri https://doi.org/10.1109/SMICND.2013.6688111
dc.identifier.uri http://repository.utm.md/handle/5014/9100
dc.description Access full text - https://doi.org/10.1109/SMICND.2013.6688111 en_US
dc.description.abstract Metal doping in nanostructured zinc oxide is important for device applications. To obtain improved performances for practical applications, Aluminum (Al) and Tin (Sn)-doping in zinc oxide nanostructured layers were investigated. Samples were grown by magnetron sputtering and studied by X-ray diffraction (XRD), micro-Raman, scanning electron microscopy (SEM), and energy dispersive X-ray (EDX) techniques. It was observed that nanoparticles are interconnected and form porous network of individual nanoparticles. It is found clear evidence of changes of different properties after doping with aluminum or tin in zinc oxide nanostructured films grown by magnetron sputtering. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject device applications en_US
dc.subject zinc oxide en_US
dc.subject magnetron sputtering en_US
dc.subject doping en_US
dc.subject nanostructured films en_US
dc.title Effect of Al Sn — Doping on properties of zinc oxide nanostructured films grown by magnetron sputtering en_US
dc.type Article en_US


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